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Takuo Sugano

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Stand Alone

Applications of plasma processes to VLSI technology
1993 International Workshop on VLSI Process and Device Modeling (1993 VPAD) ; May 14 (Fri.) - May 15 (Sat.), 1993, Nara Ken - New Public Hall, Nara, Japan
New Materials and New Physical Phenomena for Electronics of the 21st Century Proceedings of the First International Conference on Electronic Materials (ICEM '88) : June 13-15, 1988, Shigaku-Kaikan, Tokyo, Japan