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References........................................................................................... 170 List of Symbols.................................................................................... 176 CHAPTER 4 a-Si:H TFT Structures...................................................... 183 YueKuo 1. Introduction.................................................................................. 183 2. Basic Structures........................................................................... 183 3. Simplified Structures and Processes.......................................... 188 4. Unique Structures and Processes................................................ 192 5. Redundant Structures................................................................. 195 6. Summary....................................................................................... 198 References........................................................................................... 200 List of Symbols.................................................................................... 202 CHAPTER 5 Deposition of Intrinsic and Doped Semiconductor Thin Films for a-Si:H TFT..............