
Atomic layer deposition (ALD) enables precise, ultra-thin, highly conformal coatings over complex topographies with superb composition control. This issue of the ECS Transactions contains peer reviewed papers presented at the Atomic Layer Deposition Applications 7 symposium and covers recent advances in ALD technology such as high throughput coating and emerging applications including photovoltaics and advanced memory devices.
Page Count:
343
Publication Date:
2011-10-01
ISBN-10:
1566779022
ISBN-13:
9781566779029
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