Collection of selected, peer reviewed papers from the 2013 International Conference on MEMS and Mechanics (MEMSM 2013), March 15-16, 2013, Wuhan, China. The papers are grouped as follows: Chapter 1: Materials Science, Processing, Technology and Engineering; Chapter 2: MEMS and Mechatronics, Image Processing and Applications; Chapter 3: Design, Modelling in Manufacture and Manufacturing Technologies; Chapter 4: AI in Design Engineering, Information Technologies Applications.