Gettering and Defect Engineering in Semiconductor Technology Proceedings of the ... International Autumn Meeting. Höör, Schweden, September 25-28, 1999
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Author Description
Ever since the invention of the transistor, a fantastic and continual growth in silicon technology has been witnessed; leading to yet more complex functions and higher densities of devices. The current book summarises the key issues of this field.
Page Count:
628
Publication Date:
1999-01-01
ISBN-10:
3908450470
ISBN-13:
9783908450474
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